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Soloviev, O. (author), Vdovin, G. (author)This article presents a prototype of a CMOS phase sensor for high accuracy (1 Angstrom) heterodyne interferometry. Switched integrators realization of a lock-in pixel for 4-bucket phase detection algorithm is described and illustrated by experimental results. Factors that limit the accuracy of this implementation and possible ways for its...conference paper 2005
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Vdovin, G. (author), De Lima Monteiro, D.W. (author), Akhzar-Mehr, O. (author), Loktev, M. (author), Sakarya, S. (author), Soloviev, O. (author), Sarro, P.M. (author)We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of...conference paper 2004