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van den Brink, Bram (author), Alijani, F. (author), Ghatkesar, M.K. (author)An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezoelectric actuator was based on a Langevin...journal article 2019