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Pandey, Saksham (author)Hydrogenated Indium Oxide (IOH) has been recognized as a high performance transparent conductive oxide (TCO) due to its excellent mobility (>100 cm2/Vs) and high transparency (>90%) in the visible and near infrared region of the spectrum. Plasma enhanced spatial atomic layer deposition (PESALD), a new type of deposition process developed...master thesis 2019