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Oomen, T.A.E. (author), Rojas, Cristian R. (author)
A direct data-driven iterative algorithm is developed to accurately estimate the H<sub>∞</sub> norm of a linear time-invariant system from continuous operation, i.e., without resetting the system. The main technical step involves a reversed-circulant matrix that can be evaluated in a model-free setting by performing experiments on the real...
journal article 2024
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Poot, Maurice (author), van Hulst, Jilles (author), Yan, Kai Wa (author), Kostic, Dragan (author), Portegies, Jim (author), Oomen, T.A.E. (author)
The increasing demands on throughput and accuracy of semiconductor manufacturing equipment necessitates accurate feedforward motion control that includes compensation of input nonlinearities. The aim of this paper is to develop a data-driven feedforward approach consisting of a Wiener feedforward, i.e., linear parameterization with an output...
journal article 2023