Stealth fiducial markers: Enhancing re-detection efficacy of defects on blank wafers

In this thesis a stealth fiducial marker system for blank wafers is designed, fabricated and validated. The goal of this marker system it to map the coordinates of TNO’s Rapid Nano (a fast optical inspection tool) to the coordinates of scanning electron microscopes and atomic force microscopes. This way defects, that have been detected in the...

Design and Feasibility Test of a Microfluidic MEMS for an Integrated Light and Scanning Electron Microscope

Nowadays both fluorescence and scanning electron microscopy are highly developed imaging techniques that are commonly used in many fields of research. As both techniques have their own strengths and weaknesses, a combination of both techniques can complement each other in certain fields of research. The combination of these two imaging...

Improving Quality of Electron Microscopic Images Using Post-Processing Filters

Electron microscopy makes it possible to magnify samples at almost atom level by using electron beams to scan the sample. These images could be improved in terms of noise and sharpness. In this research we looked into the possibilities to use post-processing filters for improving the quality of electron microscopic images.

Equal-Channel angular pressing of high-carbon steel

This master thesis deals with the research to the effects of severe plastic deformation on the development of the microstructure and the mechanical properties of three low-alloyed high-carbon steels. The steels investigated include a hypo-eutectoid, an eutectoid and a hyper-eutectoid steel containing 0.61, 0.81 and 1.22 weight-percent carbon....