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Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

Wang, S. (author), Zong, Qihang (author), Yang, Huiru (author), Tan, C. (author), Huang, Qianming (author), Liu, X. (author), Zhang, Kouchi (author), French, P.J. (author), Ye, H. (author)

The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods...

journal article 2023

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Self-Sealing Complex Oxide Resonators

Lee, M. (author), Robin, M.P. (author), Guis, R.H. (author), Filippozzi, U. (author), Shin, D. (author), van Thiel, T.C. (author), Paardekooper, Stijn P. (author), Renshof, Johannes R. (author), van der Zant, H.S.J. (author), Caviglia, A. (author), Verbiest, G.J. (author), Steeneken, P.G. (author)

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath...

journal article 2022

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Higher-order phenomena in nanomechanics of two-dimensional material membranes

Siskins, M. (author)

This thesis studies higher-order material properties* and effects in van der Waals crystals, such as anisotropic Young’s modulus, magnetostriction, and non-trivial thermal expansion effects near magnetic and electronic phase transitions, that can affect the nanomechanical motion ofmultilayer two-dimensional (2D) material membranes. These...

doctoral thesis 2021

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Applied and fundamental studies of vibrating 2D membranes

Lee, M. (author)

This thesis encompasses both applied and fundamental studies of suspended van der Waals materials. Chapters 1 and 2 give an introduction to the field of 2D materials and some of the critical methods which facilitate the study of the suspended structures. In Chapters 3 and 4 we focus on the applications of graphene in barometric pressure sensors...

doctoral thesis 2021

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A rugged FBG-based pressure sensor for water level monitoring in dikes

Schenato, Luca (author), Aguilar Lopez, J.P. (author), Galtarossa, Andrea (author), Pasuto, Alessandro (author), Bogaard, T.A. (author), Palmieri, Luca (author)

This paper describes the implementation of an FBG sensor to measure water levels in a dike. The sensor is based on a 3D-printed mechanical transducer through which the external pressure is converted into longitudinal strain exerted on the fiber. An additional FBG integrated within the sensor measures temperature and is used to compensate for...

journal article 2021

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Wearable Sensor-Based Real-Time Gait Detection: A Systematic Review

Prasanth, H. (author), Caban, Miroslav (author), Keller, Urs (author), Courtine, Grégoire (author), Ijspeert, Auke J. (author), Vallery, H. (author), Von Zitzewitz, Joachim (author)

Gait analysis has traditionally been carried out in a laboratory environment using expensive equipment, but, recently, reliable, affordable, and wearable sensors have enabled integration into clinical applications as well as use during activities of daily living. Real-time gait analysis is key to the development of gait rehabilitation techniques...

journal article 2021

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Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Dolleman, R.J. (author), Chakraborty, Debadi (author), Ladiges, Daniel R. (author), van der Zant, H.S.J. (author), Sader, John E. (author), Steeneken, P.G. (author)

The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing...

journal article 2021

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Multi-layer graphene Pirani pressure sensors

Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)

The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...

journal article 2021

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Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)

The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...

journal article 2021

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From Silicon toward Silicon Carbide Smart Integrated Sensors

Middelburg, L.M. (author)

doctoral thesis 2020

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Design, fabrication and characterizations of AlGaN/GaN heterostructure sensors

Sun, J. (author)

The microelectronics industry, next to the powerful, continuously scaling of integrated circuits, is currently evolving in the diversification of integrated functions, generally referred to as more than Moore (MtM). MtM concerns all technologies enabling microsystems to be elevated to a higher integration level, and with small package size,...

doctoral thesis 2020

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Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration

Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)

This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...

journal article 2020

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Low power AlGaN/GaN MEMS pressure sensor for high vacuum application

Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)

A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...

journal article 2020

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Transfer-free graphene-based differential pressure sensor

Ramesha, Raghutham (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)

Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this...

conference paper 2019

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Dynamic response of sloshing pressure sensors

Schreier, S. (author), Cornel, W.A. (author), Poelma, C. (author)

The dynamic response of pressure sensors for model tests of sloshing impacts is paramount to recording these highly dynamic events. In this study, we investigated the dynamic behavior of the new pressure sensors presented at ISOPE 2018 (Schreier and Poelma, 2018), which increased the spatial resolution of sloshing pressure measurements by a...

conference paper 2019

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Sealing graphene nanodrums

Lee, M. (author), Davidovikj, D. (author), Sajadi, B. (author), Siskins, M. (author), Alijani, F. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)

Despite theoretical predictions that graphene should be impermeable to all gases, practical experiments on sealed graphene nanodrums show small leak rates. Thus far, the exact mechanism for this permeation has remained unclear, because different potential leakage pathways have not been studied separately. Here, we demonstrate a sealing method...

journal article 2019

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Dynamics of interacting graphene membranes

Dolleman, R.J. (author)

Micro and nanomechanical sensors are indispensable in modern consumer electronics, automotive and medical industries. Gas pressure sensors are currently the most widespread membrane-based micromechanical sensors. By reducing their size, their unit costs and energy consumption drops, making them more attractive for integration in new applications...

doctoral thesis 2018

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Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Vollebregt, S. (author), Dolleman, R.J. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)

We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control...

conference paper 2017

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Static capacitive pressure sensing using a single graphene drumg

Davidovikj, D. (author), Scheepers, P.H. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)

To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected...

journal article 2017

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Colorimetry Technique for Scalable Characterization of Suspended Graphene

Cartamil Bueno, S.J. (author), Steeneken, P.G. (author), Centeno, Alba (author), Zurutuza, Amaia (author), van der Zant, H.S.J. (author), Houri, S. (author)

Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, noninvasive, and affordable way of characterizing suspended...

journal article 2016