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Mohammadi, V. (author), Nihtianova, S. (author), Fang, Changming (author)The interest in nanostructures of silicon and its dopants has significantly increased. We report the creation of an ultimately-shallow junction at the surface of n-type silicon with excellent electrical and optical characteristics made by depositing an atomically thin boron layer at a relatively low temperature where no doping of silicon is...journal article 2017