Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Journal article (2005)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2005 The Author(s); American Institute of Physics
DOI
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https://doi.org/doi:10.1063/1.1857391
Titanium Atomic force microscopy Nanotechnology Nanostructured materials Magnetic anisotropy Magnetic thin films Ferromagnetic resonance Granular materials Chromium Q-factor Permalloy Surface morphology Discontinuous metallic thin films Magnetic thin film devices Interface magnetism Solenoids Magnetic cores Granular structure Electroplating Magnetic permeability Radiofrequency integrated circuits Thin film inductors Thin film circuits
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Published Date

17-05-2005

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Source:

Journal of Applied Physics, 97 (10), 2005

ISSN:

0021-8979

Source:

http://link.aip.org/link/JAPIAU/v97/i10/p10N305/s1

Faculty

Electrical Engineering, Mathematics and Computer Science

Abstract

A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (? ? 1.0??m). Nanonuclei (? ? 30–50?nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ? 50?mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency ( ? 5.5?GHz) with a maximum quality factor ( ? 3).

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