Print Email Facebook Twitter Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology Title Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology Author Rajaraman, V. Sabageh, I. French, P. Pansraud, G. Cretu, E. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2011-12-31 Abstract This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and technological features such as the use of double-folded springs, quadrature-error-compensation electrodes and 50?m thick-SOI mechanical layer enable high resolution sensing. The designed sensor characteristics have been validated using FEM simulation and equivalent circuit modelling. Subject gyroscopeangular rate sensorSOI MEMSmodal decouplingmedical instrumentation To reference this document use: http://resolver.tudelft.nl/uuid:cef109e8-60f7-4041-b64f-3b4a60c5eca3 DOI https://doi.org/10.1016/j.proeng.2011.12.161 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 25, 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 The Author(s)Elsevier Files PDF Rajaraman_2011.pdf 416.75 KB Close viewer /islandora/object/uuid:cef109e8-60f7-4041-b64f-3b4a60c5eca3/datastream/OBJ/view