Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and...

Piezoresistive Probe Array for High Throughput Applications

Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5 nm gold ultrathin film sensors on silicon substrates for high...

A Pull-in Operation Mode Accelerometer