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Van Veldhoven, E. (author), Sidorkin, V. (author), Chen, P. (author), Alkemade, P. (author), Van der Drift, E. (author), Salemink, H. (author), Zandbergen, H. (author), Maas, D. (author)
journal article 2010
document
Zandbergen, H.W. (author), Tichelaar, F.D. (author), Alkemade, P.F.A. (author)
A method for the formation of nanometer-scale electrodes, wherein strip of electrically conductive material, in particular metal, is provided with a longitudinal direction, a width direction and a thickness direction and then, with the aid of an electron beam, a groove is provided in a top surface of the strip, in the width direction of the...
patent 2006