Opto-electronic MEMS oscillator for resonant pressure sensing

This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an...

Time-of-Flight 3D Imaging based on a SPAD-TDC Pixel Array in Standard 65 nm CMOS Technology

The interest in high performance three-dimensional (3D) imaging has grown in recent years due to immense demand in engineering, science, medicine and entertainment domains. The driving goals of state-of-the-art 3D imagers are high sensitivity to light and fine depth resolution at long range. Furthermore, high level of integration is desirable to...