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Maas, D. (author), Van veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2010
document
Van Veldhoven, E. (author), Sidorkin, V. (author), Chen, P. (author), Alkemade, P. (author), Van der Drift, E. (author), Salemink, H. (author), Zandbergen, H. (author), Maas, D. (author)
journal article 2010
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Nguyen, H.M. (author), Dundar, M.A. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author), Rogge, S. (author), Caro, J. (author)
We demonstrate a compact silicon photonic crystal Mach-Zehnder interferometer operating in the self-collimation regime. By tailoring the photonic band structure such as to produce self-collimated beams, it is possible to design beam splitters and mirrors and combine these to a 20 × 20 ?m2 format. With transmission spectroscopy we find a...
journal article 2010
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Nguyen, H.M. (author), Van der Drift, E.W.J.M. (author), Caro, J. (author), Rogge, S. (author), Salemink, H.W.M. (author)
conference paper 2010
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Sidorkin, V.A. (author), Alkemade, P.F.A. (author), Salemink, H.W.M. (author), Schmits, R. (author), Van der Drift, E. (author)
A method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist is provided for enhanced pattern-transfer capabilities. The essence of the proposed method is to form a protective “cap” on top of the resist structure by means of electron-beam-induced deposition (EBID) in a self-aligned approach. This is...
journal article 2009
document
Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author), Salemink, H.W.M. (author)
The photonic properties of two classes of wavelength-sized cavities are reported for deeply etched InP/InGaAsP/InP planar photonic crystals. The high aspect, deeply etched structures are studied as potential building blocks for nonmembrane type photonic devices in standard InP photonic integrated circuits. The first class consists of cavities of...
journal article 2009
document
Sidorkin, V. (author), Van Veldhoven, E. (author), Van der Drift, E.W.J.M. (author), Alkemade, P.F.A. (author), Salemink, H. (author), Maas, D. (author)
Scanning helium ion beam lithography is presented as a promising pattern definition technique for dense sub-10-nm structures. The powerful performance in terms of high resolution, high sensitivity, and a low proximity effect is demonstrated in a hydrogen silsesquioxane resist.
journal article 2009
document
Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)
Wavelength-sized point defect cavities coupled to access waveguides are reported for deeply etched InP/InGaAsP/InP two-dimensional photonic crystals. The observed quality factor of 60 is comparable to those found for one-row defect Fabry–Perot cavities and for simple point defect cavities in membranes. The quality factor was changed by varying...
journal article 2009
document
Maas, D. (author), Van Veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2009
document
Babaei Gavan, K. (author), Westra, H.J.R. (author), Van der Drift, E.W.J.M. (author), Venstra, W.J. (author), Van der Zant, H.S.J. (author)
The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations we have compared the thickness dependence of...
journal article 2009
document
Kicken, H.H.J.E. (author), Barbu, I. (author), Kersten, S.P. (author), Dündar, M.A. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author), Samelink, H.W.M. (author)
Photonic crystal (PC) devices in the InP/InGaAsP/InP planar waveguide system exhibiting narrow bandwidth features were investigated for use as ultrasmall and tunable building blocks for photonic integrated circuits at the telecom wavelength of 1.55 ?m. The H1 cavity, consisting of a single PC-hole left unetched, represents the smallest possible...
conference paper 2009
document
Babaei Gavan, K. (author), Van der Drift, E.W.J.M. (author), Venstra, W.J. (author), Zuiddam, M.R. (author), Van der Zant, H.S.J. (author)
We present a systematic investigation of the dynamic properties of silicon nitride cantilevers in air. The thermal noise spectra of cantilevers have been measured using a home-made optical deflection setup. Torsional and flexural resonances up to the seventh mode are observed. The dependence of resonance frequencies on the dimensions and mode...
journal article 2009
document
Sidorkin, V. (author), Van der Drift, E.W.J.M. (author), Salemink, H. (author)
Performance of hydrogen silsesquioxane (HSQ) resist material with respect to the temperature during electron beam exposure was investigated. Electron beam exposure at elevated temperatures up to 90?°C shows sensitivity rise and slight contrast (?) degradation compared to lower temperature cases. Ultrahigh resolution structures formed at elevated...
journal article 2008
document
Carlström, C.F. (author), Van der Heijden, R. (author), Andriesse, M.S.P. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)
An extensive investigation has been performed on inductively coupled plasma etching of InP. An important motivation for this work is the fabrication of high-aspect-ratio holes for photonic crystals. The essential chemistry is based on Cl2 with the addition of N2 or O2 for sidewall passivation. The influence of different process parameters such...
journal article 2008
document
Caro, J. (author), Roeling, E.M. (author), Rong, B. (author), Nguyen, H.M. (author), Van der Drift, E.W.J.M. (author), Rogge, S. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)
A high-contrast-ratio (30 dB) photonic band gap in the near-infrared transmission of hole-type GaN two-dimensional photonic crystals (PhCs) is reported. These crystals are deeply etched in a 650 nm thick GaN layer grown on sapphire. A comparison of the measured spectrum with finite difference time domain simulations gives quantitative agreement...
journal article 2008
document
Driessen, E.F.C. (author), Heemskerk, P.O.M. (author), Stolwijk, D. (author), Van der Drift, E.W.J.M. (author), De Dood, M.J.A. (author)
The measured reflection spectra of two-dimensional photonic crystal slabs consist of an asymmetric peak on top of an oscillating background. For p-polarized light, the asymmetry of the peak flips for angles of incidence beyond Brewster’s angle. We explain the observed line shapes with a Fano model that includes loss and use a waveguide model to...
conference paper 2008
document
Grogorescu, A.E. (author), Van der Krogt, M.C. (author), Van der Drift, E.W.J.M. (author), Hagen, C.W. (author)
journal article 2008
document
Van der Heijden, R. (author), Kjellander, C. (author), Carlström, C.F. (author), Snijders, J. (author), Kicken, H. (author), Van der Heijden, R.W. (author), Bastiaansen, C. (author), Broer, D. (author), Van der Drift, E. (author), Salemink, H. (author)
The filling is reported of the air holes of an InP-based two-dimensional photonic crystal with solid polymer and withliquid crystal 5CB. The polymer filling is obtained by thermal polymerization of an infiltrated liquid monomer,trimethylolpropane triacrylate. The filling procedure for both the monomer and liquid crystal relies on the...
conference paper 2006
document
Rong, B. (author), Van der Drift, E. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)
We have developed a reliable process to fabricate high quality 2D air-hole and dielectric column InP photonic crystals with a high aspect ratio on a STS production tool using ICP N2+Cl2 plasma. The photonic crystals have a triangular lattice with lattice constant of 400 nm and air-hole and dielectric column radius of 120 nm. Large efforts have...
conference paper 2006
document
Van der Heijden, R. (author), Kjellander, C. (author), Carlström, C.F. (author), Snijders, J. (author), Van der Heijden, R.W. (author), Bastiaansen, K. (author), Broer, D. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author)
Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on...
conference paper 2006
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