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Mohammadi, V. (author), De Boer, W.B. (author), Nanver, L.K. (author)Surface reaction mechanisms are investigated to determine the activation energies of pure boron (PureB) layer deposition at temperatures from 350?°C to 850?°C when using chemical-vapor deposition from diborane in a commercial Si/SiGe epitaxial reactor with either hydrogen or nitrogen as carrier gas. Three distinguishable regions are identified...journal article 2012
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Zijlstra, T. (author), Lodewijk, C.F.J. (author), Vercruyssen, N. (author), Tichelaar, F.D. (author), Loudkov, D.N. (author), Klapwijk, T.M. (author)High critical current-density (10?to?420?kA/cm2) superconductor-insulator-superconductor tunnel junctions with aluminum nitride barriers have been realized using a remote nitrogen plasma from an inductively coupled plasma source operated in a pressure range of 10?3–10?1?mbar. We find a much better reproducibility and control compared to previous...journal article 2007
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- Mantel, O.C. (author), Van der Zant, H.S.J. (author), Steinfort, A.J. (author), Dekker, C. (author), Traeholt, C. (author), Zandbergen, H.W. (author) journal article 1997
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- Van der Zant, H.S.J. (author), Mantel, O.C. (author), Dekker, C. (author), Mooij, J.E. (author), Traeholt, C. (author) journal article 1996