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Announcing TU Delft Repository replacement
On
2 July 2024
TU Delft Repository will be replaced with a fresh user friendly design with monthly new feature releases.
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Collection: research
(1 - 5 of 5)
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Simulation for stability of a beam-mass based high-resolution MEMS gravimeter
High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
Designing a 100 [aF/nm] capacitive transducer
Non-linear bulk micromachined accelerometer for high sensitivity applications
High aspect ratio spiral resonators for process variation investigation and MEMS applications
Collection: research
(1 - 5 of 5)
Document type
Date
List view
Grid view
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