Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System

Journal article (2012)
Department
Delft Institute of Microsystems and Nanoelectronics (EEMCS) (TU Delft)
Copyright: © 2012 The Author(s)
DOI: https://doi.org/doi:10.1016/j.proeng.2012.09.280
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Published Date

09-09-2012

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Source:

Procedia Engineering, 47, 2012

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Delft Institute of Microsystems and Nanoelectronics

Abstract

A micro-electro-mechanical-system (MEMS) based, temperature triggered, switch is developed as a cost-effective solution for smart cooling control of solid-state-lighting systems. The switch (1.0x0.4 mm2) is embedded in a silicon substrate and fabricated with a single-mask 3D micro-machining process. The device switches on at a designed temperature threshold (130 °C) with a contact resistance of < 2 ohm, and switches off when the temperature drops below that limit. In this way, automatic control of a cooling system is possible, without any need of additional electronic components. The research is a part of the Enlight project.

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