Optimisation of polishing processes by using iTIRM for in-situ monitoring of surface quality

Conference paper (2003)
Department
Imaging Science and Technology (AS) (TU Delft)
Copyright: ©2004 Meeder, M., Mauret, T., Booij, S., Braat, J., Faehnle, O.
Polishing Surface measurement In-process measurement Ductile grindling
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Published Date

22-12-2003

Reuse Rights

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Source:

Proceedings of SPIE, 2004 vol. 5180

ISSN:

0277-786X

Faculty

Applied Sciences

Department

Imaging Science and Technology

Abstract

The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that iTIRM can be used for both mentioned applications but that it is, at least for now, an R&D tool only and not applicable in production.