(100)-textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

Journal article (2006)

Authors

M. He

R. Ishihara

W. Metselaar

K. Beenakker

Department

DIMES () (TU Delft)

DOI: https://doi.org/doi:10.1063/1.2358405

Crystallisation Self-assembly Silicon Surface texture Elemental semiconductors Laser beam effects Excimer lasers

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Published Date

18-10-2006

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Source:

Journal of Applied Physics, 100 (8), 2006

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

DIMES

Abstract

Strong preference for (100) surface and in-plane orientations has been observed in polycrystalline silicon film on SiO2 after crystallization with multiple excimer laser pulses. Laser induced periodic surface structure (LIPSS) is developed in the film, constructing self-assembled square-shaped grains. The clear texture can be observed in a relatively wide energy density window, from 250?to?275?mJ/cm2, for a 30?nm thick ?-Si layer. It is speculated that the lateral growth velocity of (100)-oriented grains is the fastest, and the orthogonal in-plane (100) directions are developed due to the alternate directions of melting and solidification during the LIPSS formation.

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