Preferred Surface and In-Plane Orientations in Self-Assembled Poly-Si by Multiple Excimer Laser Irradiation

Journal article (2006)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2006 The Electrochemical Society
DOI: https://doi.org/doi:10.1149/1.2356350
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Published Date

31-12-2006

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Source:

ECS Transactions, 3 (8), 2006

Faculty

Electrical Engineering, Mathematics and Computer Science

Abstract

Clear preference of - orientation in self-assembled poly- Si is observed for the first time not only in surface, but also in-plane orientations. This textured poly-Si can be used for TFT active channel, expecting a high performance with an excellent uniformity; or can be used as a seed layer for orientation controlling.

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