A Lossy Fabry-perot Based Optical Filter for Natural Gas Analysis

Journal article (2014)
Department
Microelectronics (EEMCS) (TU Delft)
Copyright: This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/)
DOI: https://doi.org/doi:10.1016/j.proeng.2014.11.707
Gas sensor Spectroscopy Infrared Optical filter
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Published Date

31-12-2014

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Source:

Procedia Engineering, 87, 2014; EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers

ISSN:

1877-7058

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Abstract

A set-up for optical gas composition measurement based on absorption spectroscopy is composed of a white light source, a gas cell and a spectrometer. The Fabry-Perot optical filter is suitable for miniaturization of this system, as it is composed of only two reflectors with a transparent layer in-between. Varying the width of this optical resonator to cover the wavelength range in which the components to be analyzed have specific features, gives the absorption spectrum. The gas cell remains a separate unit in the conventional microsystem and a MEMS is the implementation of the microspectrometer. The ultimate miniaturization requires the monolithic integration of all these components. In the lossy Fabry-Perot filter that is presented in this paper, the gas cell and the microspectrometer are functionally integrated, using a gas-filled resonator in which the optical path is determined by multiple reflections in the resonator cavity itself.

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