Estimating resist parameters in optical lithography using the extended Nijboer-Zernike theory

Journal article (2006)
Department
Optics Research Group (AS) (TU Delft)
Copyright: ©2006 Dirksen, P., Braat, J., Janssen, A.J.E.M.
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Published Date

30-01-2006

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Source:

Journal of microlithography, microfabrication, and microsystems , 5.2006, nr.1

Faculty

Applied Sciences

Department

Optics Research Group

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