Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Journal article (2009)
Department
Delft Institute of Microsystems and Nanoelectronics (EEMCS) (TU Delft)
Copyright: ©2009 The Authors; Institute of Physics
DOI: https://doi.org/doi:10.1088/1742-6596/187/1/012043
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Published Date

31-12-2009

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Source:

Journal of physics. Conference series, 187

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Delft Institute of Microsystems and Nanoelectronics

Abstract

A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition (ALD) the expected sensitivity of the air core configuration outperforms the previously reported results.

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