A piezo-thermal probe for thermomechanical analysis

Journal article (2011)

Authors

A. Gaitas

S. Gianchandani

W. Zhu

Faculty

Electrical Engineering, Mathematics and Computer Science () (TU Delft)

DOI: https://doi.org/doi:10.1063/1.3587624

Atomic force microscopy Micromachining Thermal expansion Microsensors Micromechanical devices Piezoelectric devices

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Published Date

10-05-2011

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Source:

Review of Scientific Instruments, 82 (5), 2011

Faculty

Electrical Engineering, Mathematics and Computer Science

Abstract

Thermomechanical analysis (TMA) is widely used to characterize materials and determine transition temperatures and thermal expansion coefficients. Atomic-force microscopy (AFM) microcantilevers have been used for TMA. We have developed a micromachined probe that includes two embedded sensors: one for measuring the mechanical movement of the probe (deflection) and another for providing localized heating. The new probe reduces costs and complexity and allow for portability thereby eliminating the need for an AFM. The sensitivity of the deflection element ((?R/R)/deflection) is 0.1 ppm/nm and its gauge factor is 3.24. The melting temperature of naphthalene is measured near 78.5 ºC.

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