Integrated micro vacuum tubes in silicon

Doctoral thesis (1996)

Authors

Contributors

S. Middelhoek (promotor)
R.F. Wolffenbuttel (promotor)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 1996 J.A. Foerster
Silicon micromachining Vacuum tubes Triode
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Published Date

19-01-1996

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ISBN:

90-407-1389-8

Faculty

Electrical Engineering, Mathematics and Computer Science