Designing Lithographic Objectives by Constructing Saddle Points

Conference paper (2006)
Department
Optics Research Group (AS) (TU Delft)
Copyright: O. Marinescu, F. Bociort
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Published Date

05-01-2006

Reuse Rights

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Source:

Proceedings SPIE 6342, 6342L (2006).

Faculty

Applied Sciences

Department

Optics Research Group

Abstract

Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design techniques. It has significantly improved the productivity of the design process in all cases in which it has been applied so far.