Print Email Facebook Twitter Hot-spot detection and calibration of a scanning thermal probe with a noise thermometry gold wire sample Title Hot-spot detection and calibration of a scanning thermal probe with a noise thermometry gold wire sample Author Gaitas, A. Wolgast, S. Covington, E. Kurdak, C. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2013-02-20 Abstract Measuring the temperature profile of a nanoscale sample using scanning thermal microscopy is challenging due to a scanning probe's non-uniform heating. In order to address this challenge, we have developed a calibration sample consisting of a 1-?m wide gold wire, which can be heated electrically by a small bias current. The Joule heating in the calibration sample wire is characterized using noise thermometry. A thermal probe was scanned in contact over the gold wire and measured temperature changes as small as 0.4?K, corresponding to 17?ppm changes in probe resistance. The non-uniformity of the probe's temperature profile during a typical scan necessitated the introduction of a temperature conversion factor, ?, which is defined as the ratio of the average temperature change of the probe with respect to the temperature change of the substrate. The conversion factor was calculated to be 0.035?±?0.007. Finite element analysis simulations indicate a strong correlation between thermal probe sensitivity and probe tip curvature, suggesting that the sensitivity of the thermal probe can be improved by increasing the probe tip curvature, though at the expense of the spatial resolution provided by sharper tips. Simulations also indicate that a bow-tie metallization design could yield an additional 5- to 7-fold increase in sensitivity. Subject calibrationfinite element analysisgoldscanning probe microscopytemperature measurement To reference this document use: http://resolver.tudelft.nl/uuid:5e5a5a5a-6f48-4599-adef-d363255bb277 DOI https://doi.org/10.1063/1.4792656 Publisher American Institute of Physics ISSN 0021-8979 Source https://doi.org/10.1063/1.4792656 Source Journal of Applied Physics, 113 (7), 2013 Part of collection Institutional Repository Document type journal article Rights © 2013 American Institute of Physics Files PDF Gaitas_2013.pdf 1.02 MB Close viewer /islandora/object/uuid:5e5a5a5a-6f48-4599-adef-d363255bb277/datastream/OBJ/view