Surface stress-induced change in overall elastic behavior and self-bending of ultrathin cantilever plates

Journal article (2009)
Department
Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2009 The Author(s); American Institute of Physics
DOI: https://doi.org/doi:10.1063/1.3153158
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Published Date

09-06-2009

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Source:

Applied Physics Letters, 94 (23), 2009

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Abstract

In this letter, the dominant role of surface stress and surface elasticity on the overall elastic behavior of ultrathin cantilever plates is studied. A general framework based on two-dimensional plane-stress analysis is presented. Because of either surface reconstruction or molecular adsorption, there exists a surface stress and a surface elasticity imbalance between top and bottom surface of the cantilever. The surface elasticity imbalance creates an extra bending-extensional coupling which has not been taken into account previously. This leads to a modified extensional stiffness, bending stiffness and bending-extensional coupling stiffness. Due to the surface stress imbalance, an extended Stoney’s formula for self-bending of ultrathin cantilevers is derived.

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