Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Journal article (2008)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2008 Grabarnik, S.; Emadi, A.; Wu, H.; De Graaf, G.; Vdovin, G.; Wolffenbuttel, R.F.
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Published Date

13-05-2008

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Source:

Journal of Micromechanics and Microengineering, 18 (6), 2008

Faculty

Electrical Engineering, Mathematics and Computer Science