Effect of post oxidation anneal on VUV radiation-hardness of the Si/SiO2 system studied by positron annihilation spectroscopy

Journal article (1995)
Copyright: © 1995 Clement, M.; de Nijs, J.M.M.; van Veen, A.; Schut, H.; Balk, P.
More Info
expand_more

Published Date

1995

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Source:

IEEE Transactions on Nuclear Science, 42 (6)