Thermodynamic Calculations on the Chemical Vapor-Deposition of Silicon-Nitride and Silicon from Silane and Chlorinated Silanes

Journal article (1992)
Si-h-cl dissociation-energy heats sicl4 thermochemistry systems equilibria si3n4
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Published Date

1992

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Source:

Journal of the American Ceramic Society 75(3), 619-628. (1992)

ISSN:

0002-7820

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