The relationship between microsystem technology and metrology

Journal article (2001)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2001 Wolffenbuttel, R.F.; van Mullem, C.J.
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Published Date

2001

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Source:

IEEE Transactions on Instrumentation and Measurement, 50 (6)

ISSN:

0018-9456

Faculty

Electrical Engineering, Mathematics and Computer Science