Experimental techniques for aberration retrieval with through-focus intensity images

Conference paper (2012)
Department
Image Science and Technology (AS) (TU Delft)
Copyright: ©2012 The Authors and SPIE
DOI: https://doi.org/doi:10.1117/12.2000376
Diffraction, point-spread function, Debye integral, phase retrieval, aberrations
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Published Date

26-11-2012

Reuse Rights

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Source:

Proceedings of SPIE, 2012 vol. 8557

ISSN:

0277-786X

Source:

http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1457357

Faculty

Applied Sciences

Department

Image Science and Technology

Abstract

Measurement techniques to determine the aberration of an optical system, by obtaining through-focus intensity images that are produced when the object is a point source at infinity, are shown. The analysis of the aberrations is made using the extended version of the Nijboer-Zernike diffraction theory. This theory provides a semi analytical solution of the Debye diffraction integral and thus a direct relation between the intensity distribution of the field at the focal region and the exit pupil of the optical system

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