Fiber-coupled displacement interferometry without periodic nonlinearity

Journal article (2011)
Department
Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2011 Optical Society of America
DOI: https://doi.org/doi:10.1364/OL.36.003584
Interferometry Optical design of instruments Optical systems Metrological instrumentation Fringe analysis Instrumentation, measurement and metrology
More Info
expand_more

Published Date

12-09-2011

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Source:

Optics Letters, 36 (18), 2011

ISSN:

0146-9592

Source:

http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-18-3584

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants.

Files

Ellis_2011.pdf
(pdf | 0.768 Mb)