Chemical Vapor Deposition

It's not just Chemistry

Journal article (2006)

Authors

Department
MSP/Multi-Scale Physics (AS) (TU Delft)
Copyright: The Electrochemical Society
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Published Date

07-05-2006

Reuse Rights

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Source:

Meeting Abstracts - Electrochemical Society, 209th ECS Meeting, Denver, USA, 7-12 May 2006: Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Processing III

Faculty

Applied Sciences

Department

MSP/Multi-Scale Physics

Files

Kleijn.pdf
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