Print Email Facebook Twitter Simple heterodyne laser interferometer with subnanometer periodic errors Title Simple heterodyne laser interferometer with subnanometer periodic errors Author Joo, K.N. Ellis, J.D. Spronck, J.W. Van Kan, P.J.M. Munnig Schmidt, R.H. Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2009-01-30 Abstract We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be enhanced by a factor of 2, because the phase change direction is opposite between reference and measurement signals. Experiments have demonstrated the periodic errors are less than 0.15 nm owing to the frequency mixing of the optical source. The improvements for reducing the frequency mixing of the optical system are also discussed. Subject interferometrymetrological instrumentationmetrology To reference this document use: http://resolver.tudelft.nl/uuid:e61260cf-3c26-4a96-a548-f0da20209e10 DOI https://doi.org/10.1364/OL.34.000386 Publisher Optical Society of America ISSN 0146-9592 Source http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-34-3-386 Source Optics Letters, 34 (3), 2009 Part of collection Institutional Repository Document type journal article Rights (c) 2009 Optical Society of America Files PDF Ellis2_2009.pdf 349.1 KB Close viewer /islandora/object/uuid:e61260cf-3c26-4a96-a548-f0da20209e10/datastream/OBJ/view