Compensating commutation-angle domain disturbances with application to waveform optimization for piezo stepper actuators

Journal article (2023)

Authors

Leontine Aarnoudse Eindhoven University of Technology
Nard Strijbosch IBS Precision Engineering
Paul Tacx Eindhoven University of Technology
Edwin Verschueren Thermo Fisher Scientific
Tom Oomen Eindhoven University of Technology, Team Jan-Willem van Wingerden - Mechanical, Maritime and Materials Engineering
T.A.E. Oomen Eindhoven University of Technology, Team Jan-Willem van Wingerden - Mechanical, Maritime and Materials Engineering
Research Group
Team Jan-Willem van Wingerden (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2023 Leontine Aarnoudse, Nard Strijbosch, Paul Tacx, Edwin Verschueren, T.A.E. Oomen
DOI: https://doi.org/10.1016/j.mechatronics.2023.103016
More Info
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Published Date

2023

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

Team Jan-Willem van Wingerden

Abstract

Piezo stepper actuators are very promising for nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite stroke by means of motion reminiscent of walking. The aim of this paper is to enhance the waveforms for actuating piezo steppers, by actively compensating for repetitive disturbances that are introduced by the walking behavior. A compensation method is developed to compensate for disturbances in the stepping domain, since disturbances may vary in the time domain if the velocity changes. The results from this procedure are exploited to determine an optimal waveform for the working range of the actuator. A significant improvement in performance is achieved after applying this waveform to a piezo stepper actuator.