A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry

Conference paper (2010)

Authors

C. Liu

A. Emadi

H. Wu

G. De Graaf

R.F. Wolffenbuttel

Department

Department of ME/EI () (TU Delft)

LVOF Capacitive transimpedance amplifier Correlated double sampling Active pixel sensor IC-compatible microspectrometers Variable integration time

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Published Date

07-05-2010

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Source:

Proceedings of SPIE, 2010, vol. 7726

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Department of ME/EI

Abstract

A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2?m×300?m). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100?s~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35?m A/D CMOS technology.

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