MEMS-based Linear Thermopile Detector Arrays for IR Microspectrometers

Doctoral thesis (2011)

Authors

Contributors

G.C.M. Meijer (promotor)
R.F. Wolffenbuttel (promotor)
Department
Microelectronics (EEMCS) (TU Delft)
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Published Date

26-08-2011

Reuse Rights

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ISBN:

9789461901026

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Files

TR_DISS_6133.pdf
(pdf | 41.5 Mb)