Helium ion beam induced growth of hammerhead AFM probes

Journal article (2015)
Department
QN/Quantum Nanoscience (AS) (TU Delft)
Copyright: © 2015 American Vacuum Society
Silicon Atomic force microscopy Semiconductor growth Ion beams Atomic force microscopes
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Published Date

18-11-2015

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Source:

Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures, 33 (6), 2015

ISSN:

1071-1023

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Abstract

The authors report the direct-write growth of hammerhead atomic force microscope(AFM) probes by He+beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the beam results in the required three-dimensional (hammerhead) shape. The diameter of the needle depends on the ion beam dose, beam dwell time, and speed of the beam movement. A nanoneedle radius below 10?nm and a hammerhead smaller than 35?nm have been achieved. This fabrication process is robust and enables precise control over the three-dimensions of the hammerhead AFM probe. Finally, the authors test the capabilities of the fabricated AFM probes for two-dimensional metrology of sidewall angles and line-edge roughness of trenches and shark-fins in silicon.

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