Electrostatic instability of micro-plates subjected to differential pressure

A semi-analytical approach

Journal article (2018)

Authors

B. Sajadi Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2018 B. Sajadi, J.F.L. Goosen, A. van Keulen
DOI: https://doi.org/10.1016/j.ijmecsci.2018.02.007
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Published Date

2018

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

Electrostatic instability is one of the main features of many electrostatic MEMS and NEMS devices. In this paper, we investigate how the electrostatic instability of a plate-like electrode can be affected by a differential pressure. The results of this study indicate that the presence of differential pressure can have a significant influence on the equilibrium path, the number and location of unstable points, and the post-instability behavior. As a result, while the system is loaded and unloaded electrically, the electrostatic instability might lead to a snapping behavior. The noticed snapping behavior of a flat plate makes it very appealing for sensing and actuating applications. This study is based on both a semi-analytical framework and finite element simulations. The proposed analytical solution is shown to be accurate enough to be used as an effective tool for design.