Polymeric Thermal Microactuator With Embedded Silicon Skeleton

Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper

Journal article (2008)
Department
Microelectronics & Computer Engineering (EEMCS) (TU Delft)
Copyright: © 2008 IEEE
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Published Date

01-08-2008

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Source:

Journal of Microelectromechanical Systems, 17 (4), 2008

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering

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