Print Email Facebook Twitter Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy Title Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy Author Ayerden, N.P. (TU Delft Electronic Instrumentation) Mandon, Julien (Radboud Universiteit Nijmegen) Harren, Frans J.M. (Radboud Universiteit Nijmegen) Wolfenbuttel, R.F. (TU Delft Electronic Instrumentation) Date 2017 Abstract Increasing demand for field instruments designed to measure gas composition has strongly promoted the development of robust, miniaturized and low-cost handheld absorption spectrometers in the mid-infrared. Efforts thus far have focused on miniaturizing individual components. However, the optical absorption path that the light beam travels through the sample defines the length of the gas cell and has so far limited miniaturization. Here, we present a functionally integrated linear variable optical filter and gas cell, where the sample to be measured is fed through the resonator cavity of the filter. By using multiple reflections from the mirrors on each side of the cavity, the optical absorption path is elongated from the physical mm -level to the effective mm -level. The device is batch-fabricated at the wafer level in a CMOS-compatible approach. The optical performance is analyzed using the Fizeau interferometer model and demonstrated with actual gas measurements Subject gas sensorsoptical absorption spectroscopymid-infraredmicrocavitiesFabry–PerotFizeau interferometerOA-Fund TU Delft To reference this document use: http://resolver.tudelft.nl/uuid:7291c757-4ba2-4e8e-af4b-c2cfb3cc216f DOI https://doi.org/10.3390/s17092041 ISSN 1424-8220 Source Sensors, 17 (9) Part of collection Institutional Repository Document type journal article Rights © 2017 N.P. Ayerden, Julien Mandon, Frans J.M. Harren, R.F. Wolfenbuttel Files PDF sensors_17_02041_v2.pdf 5.28 MB Close viewer /islandora/object/uuid:7291c757-4ba2-4e8e-af4b-c2cfb3cc216f/datastream/OBJ/view