Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy

Ayerden, N.P.; Mandon, Julien; Harren, Frans J.M.; Wolfenbuttel, R.F.

doi:10.3390/s17092041

Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy

Title

Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy

Author

Ayerden, N.P. (TU Delft Electronic Instrumentation)
Mandon, Julien (Radboud Universiteit Nijmegen)
Harren, Frans J.M. (Radboud Universiteit Nijmegen)
Wolfenbuttel, R.F. (TU Delft Electronic Instrumentation)

Date

2017

Abstract

Increasing demand for field instruments designed to measure gas composition has strongly promoted the development of robust, miniaturized and low-cost handheld absorption spectrometers in the mid-infrared. Efforts thus far have focused on miniaturizing individual components. However, the optical absorption path that the light beam travels through the sample defines the length of the gas cell and has so far limited miniaturization. Here, we present a functionally integrated linear variable optical filter and gas cell, where the sample to be measured is fed through the resonator cavity of the filter. By using multiple reflections from the mirrors on each side of the cavity, the optical absorption path is elongated from the physical mm -level to the effective mm -level. The device is batch-fabricated at the wafer level in a CMOS-compatible approach. The optical performance is analyzed using the Fizeau interferometer model and demonstrated with actual gas measurements

Subject

gas sensors
optical absorption spectroscopy
mid-infrared
microcavities
Fabry–Perot
Fizeau interferometer
OA-Fund TU Delft

To reference this document use:

http://resolver.tudelft.nl/uuid:7291c757-4ba2-4e8e-af4b-c2cfb3cc216f

DOI

https://doi.org/10.3390/s17092041

ISSN

1424-8220

Source

Sensors, 17 (9)

Part of collection

Institutional Repository