Mechanics of Ultra-sensitive Nanoelectromechanical Silicon Cantilevers

A Combined Experimental-Theoretical Approach

Doctoral thesis (2010)

Contributors

A. Van Keulen (promotor)
Department
Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2010 Sadeghian Marnani, H.
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Published Date

15-12-2010

Reuse Rights

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ISBN:

978-94-91104-05-3

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Files

5854.pdf
(pdf | 25.1 Mb)