Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory

Conference paper (2005)
Department
Imaging Science and Technology (AS) (TU Delft)
Copyright: ©2004 Dirksen, P., Braat, J.J.M., Janssen, A.J.E.M., Leeuwestein, A.
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Published Date

12-05-2005

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Source:

Proceedings of SPIE, 2004 vol. 5754

Faculty

Applied Sciences

Department

Imaging Science and Technology