Optimal implementation of a microspectrometer based on a single flat diffraction grating

Journal article (2008)
Department
Micro Electronics (EEMCS) (TU Delft)
Copyright: © 2008 Optical Society of America
DOI: https://doi.org/doi:10.1364/AO.47.002082
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Published Date

16-04-2008

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Source:

Applied Optics, 47 (12), 2008

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Micro Electronics

Abstract

An analytical model has been developed and applied to explore the limits in the design of a highly miniaturized planar optical microspectrometer based on an imaging diffraction grating. This design tool has been validated as providing the smallest possible dimensions while maintaining acceptable spectral resolution. The resulting planar spectrometer is composed of two parallel glass plates, which contain all components of the device, including a reflective slit and an imaging diffraction grating. Fabrication is based on microelectromechanical system technology and starts with a single glass wafer; IC-compatible deposition and lithography are applied to realize the parts in aluminum, which makes the microspectrometer highly tolerant for component mismatch. The fabricated spectrometer was mounted directly on top of an image sensor and takes up a volume of only 50mm3. The measured spectral resolution of 6nm (FWHM) in the 100nm operating wavelength range (600–700 nm) is in agreement with a model calculation.