Spray coating of photoresist for pattern transfer on high topography surfaces

Journal article (2005)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2005 Pham, N.P.; Burghartz, J.N.; Sarro, P.M.
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Published Date

2005

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Source:

Journal of Micromechanics and Microengineering, 15 (4)

ISSN:

0960-1317

Faculty

Electrical Engineering, Mathematics and Computer Science