Graphene based piezoresistive pressure sensor

Journal article (2013)
Department
Precision and Microsystems Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2013 AIP Publishing LLC
DOI: https://doi.org/doi:10.1063/1.4802799
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Published Date

23-04-2013

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Source:

Applied Physics Letters, 102 (16), 2013

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Abstract

We present a pressure sensor based on the piezoresistive effect of graphene. The sensor is a 100?nm thick, 280??m wide square silicon nitride membrane with graphene meander patterns located on the maximum strain area. The multilayer, polycrystalline graphene was obtained by chemical vapor deposition. Strain in graphene was generated by applying differential pressure across the membrane. Finite element simulation was used to analyze the strain distribution. By performing electromechanical measurements, we obtained a gauge factor of ?1.6 for graphene and a dynamic range from 0?mbar to 700?mbar for the pressure sensor.

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