Experimental Investigation of Adhesion and Friction Phenomena of Ultrananocrystalline Diamond (UNCD) and Aluminum Oxide in MEMS

Doctoral thesis (2015)

Authors

Contributors

U. Staufer (promotor)
Department
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2015 Buja, F.
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Published Date

15-09-2015

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Micro and Nano Engineering

Abstract

This thesis aims to provide the latest progresses on the experimental investigation of friction and adhesion phenomena, occurring at the nanoscale in microelectromechanical systems (MEMS). I have studied and characterized the interaction between MEMS sidewalls in contact and sliding one onto another. Ultrananocrystalline diamond (UNCD) and aluminum oxide have been tested and utilized for the fabrication and integration process in MEMS micro-tribotesters. The results of this research are new in the field of nanotribology, and interesting for the development of micro-devices that can allow sliding surfaces in their operations.