Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration

Journal article (2012)
Department
Delft Center for Systems and Control (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: ©2012 The Authors and Springer
DOI: https://doi.org/doi:10.1007/s00502-012-0070-8
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Published Date

01-01-2012

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Source:

e & i Elektrotechniek und Informationstechnik, 129(1)2012

Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Abstract

In atomic force microscopy (AFM) high-performance and high precision control of the scanning-system is crucial. At high imaging speeds the dynamic behaviour of the scanner may cause imaging artefacts limiting the maximum imaging rate. This contribution discusses recent improvements for faster imaging by utilizing modern mechatronic and control engineering methods.

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