Thick Single Grain Silicon Formation with Microsecond Green Laser Crystallization

Journal article (2012)
Department
Microelectronics (EEMCS) (TU Delft)
Copyright: © 2013 The Electrochemical Society
DOI: https://doi.org/doi:10.1149/05008.0035ecst
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Published Date

31-12-2012

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Source:

ECS Transactions, 50 (8), 2013

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Abstract

625 nm thick a-Si layer was crystallized by using microsecond pulsed green laser with wavelength of 515 nm. At least 8 ?m size grains were formed using location controlled single grain technique at room temperature. Energy density window for crystallization and ablation were compared for pulse durations of 300 ns, 1000 ns and 1200 ns.

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